Calibration method of tool measuring microscope
Regarding the machine debugging of the measuring tool microscope, from the application point of view, it mainly includes the level adjustment of the stage, the anti-shock adjustment of the workbench, the level adjustment of the eyepiece meter line, the level adjustment of the video system and the accuracy correction, etc. The following is a summary one time:
1. Level adjustment of the stage: judge whether the stage is installed horizontally according to the level placed on the stage. If necessary, adjust the three supporting legs according to the actual situation until the air bubbles in the level stay on the ruler near the center.
2. Anti-vibration adjustment of the workbench: If the data on the data display is unstable when the machine is turned on, it can be judged that the workbench is not stable enough, which can be completed by adding anti-vibration pads to the workbench and replacing it with a stronger workbench.
3. Horizontal adjustment of the eyepiece cross-shaped line: Find a striking small point within the field of view of the eyepiece with clear focus, and move it to one end of the eyepiece cross-line (X and Y directions are acceptable, and the X direction is used here as the force) And aligned, shake the handle in X direction, so that the small dot moves to the other end along the X-direction marking line, if the small dot deviates from the X-direction marking line, adjust the eyepiece to the corresponding direction to make the small point close to the X-direction marking line, in this way Repeated debugging until the small point can always stay on the X-direction marking line when the stage moves along the X-direction.
4. Level adjustment of the video system: (This item generally does not need to be adjusted, unless the microscope is equipped with a rotary table and the user needs to adjust the level of the components through the frequency modulation system) Take a standard block gauge and place it on the rotary table, use the adjusted eyepiece Adjust the whole block to the level of the rice word line; tighten the CCD (video system) and the video interface, connect it to the microscope interface and lock it; move one end of the block gauge to the end of the cross line X direction in the software window, and shake the X The axis handle allows the software to see the other end of the block gauge. If the quick gauge deviates from the X axis, rotate the CCD to make the block gauge approach the X axis (this adjustment method is the same as the eyepiece adjustment method). Repeated adjustments in this way until the block gauge always moves along the X direction, at this time the physical coordinate system of the CCD can be considered to be parallel to the mechanical coordinate system of the microscope stage.
