Introducing an Automated Atomic Force Microscope Like Never Before
The NX-3DM automatic atomic force microscope system launched by Park Systems is specially designed for overhang contour, high-resolution sidewall imaging and critical angle measurement. With the unique XY-axis and Z-axis independent scanning system and tilting Z-axis scanner, NX-3DM successfully overcomes the challenges posed by normal and flared heads in accurate sidewall analysis. In True Non-Contact™ mode, the NX-3DM enables non-destructive measurement of soft photoresists with high aspect ratio tips.
unprecedented precision
As semiconductors get smaller, designs now need to be at the nanoscale, but traditional measurement tools cannot provide the precision required for nanoscale design and manufacturing. Facing this industry measurement challenge, Park AFM has made many technological breakthroughs, such as crosstalk elimination, which can achieve artifact-free and non-destructive imaging; the new 3D AFM makes high-resolution imaging of sidewall and undercut features possible .
unprecedented throughput
Due to the limitation of low throughput, nanoscale design cannot be used in production quality control, but atomic force microscopy makes it possible. With the high-throughput solution released by Park Systems, atomic force microscopy has also entered the field of automated online manufacturing. This includes an innovative magnetic probe replacement feature with a 99% success rate, higher than conventional vacuum technology. In addition, process and throughput optimization requires the active cooperation of customers to provide complete raw data.
Unprecedented cost-effectiveness
The precision and high throughput of nanoscale measurements need to be paired with cost-effective solutions to scale from research to real-world production applications. Facing this cost challenge, Park Systems has brought an industrial-grade atomic force microscope solution to make automated measurements faster and more efficient, and make probes more durable! We have given up the slow and expensive scanning electron microscope and switched to the efficient, automated and affordable 3D atomic force microscope to further reduce the measurement cost of online industrial manufacturing. Today, manufacturers need 3D information to characterize trench profiles and sidewall variations to accurately locate defects in new designs. The modular AFM platform enables rapid hardware and software replacement, making upgrades more cost-effective and continuously optimizing complex and demanding production quality control measurements. In addition, our AFM probes last at least 2 times longer, further reducing the cost of ownership. Traditional AFMs use tapping scanning, which makes the tip more prone to wear and tear, but our True Non-Contact™ mode can effectively protect the tip and prolong its life.
