Name and function of each part of the confocal microscope
Based on the principle of confocal technology, the confocal microscope is used to measure the surface of various precision devices and materials at the micro and nano level, and can directly image the surface morphology of material samples, with a lateral resolution of up to 1 nm and a Z-axis resolution of up to 0.5 nm. It can not only measure the surface morphology of the sample and provide the function of characterising the microscopic morphology of the profile size measurement, but also provide five major analytical functions, such as roughness analysis, geometrical profile analysis, structural analysis, frequency analysis and functional analysis. Roughness analysis, geometric profile analysis, structural analysis, frequency analysis, and functional analysis are also provided.
Roughness analysis includes full-parameter analysis according to ISO4287 line roughness, ISO25178 surface roughness, ISO12781 flatness, etc.; geometric contour analysis includes step height, distance, angle, curvature and other feature measurements and straightness, roundness and form tolerance assessment; structural analysis includes the volume of the holes and the depth of the trough, etc.; frequency analysis includes the direction of the grain and the spectrum analysis; functional analysis includes the direction and frequency spectrum analysis; frequency analysis includes the direction and frequency spectrum analysis; and functional analysis is also available. Frequency analysis includes texture direction and spectrum analysis; Functional analysis includes SK parameters and volume parameters.
The structure of confocal microscope mainly consists of: microscope, laser light source, scanning device, detector, computer system (including data acquisition, processing, conversion, application software), image output device, optical device and confocal system.
In ceramics, metals, semiconductors, chips and other materials science and production inspection field, confocal microscope has a wide range of applications. Confocal microscope based on the principle of confocal microscopy, non-contact scanning of the device surface and the establishment of the surface 3D image, through the system software on the device surface 3D image data processing and analysis, so as to obtain the 2D, 3D parameters reflecting the quality of the surface of the device, to achieve the device surface morphology 3D measurement.
Can be widely used in semiconductor manufacturing and packaging process inspection, 3C electronic glass screen and its precision parts, optical processing, micro-nano-materials manufacturing, automotive parts, MEMS devices and other ultra-precision machining industry and aerospace, scientific research institutes and other fields. Measure and analyse the surface profile, surface defects, wear and tear, corrosion, flatness, roughness, corrugation, pore clearance, step height, bending deformation, processing and other surface features of various products, components and material surfaces.
