What is the working principle of thin film coating online thickness gauge

Jan 23, 2023

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What is the working principle of thin film coating online thickness gauge

 

Jingpu Measurement and Control Thin Film Coating Online Thickness Gauge is an online thickness measuring instrument that uses the principle of optical coating technology to detect the thickness of materials. Precision spectrum measurement and control thin film online thickness gauge is often used to batch test the thickness of materials on the production line. Responding to abnormal data is an important link in automated production. Nowadays, due to the rapid development of science and technology, thin-film coating online thickness gauges have become an indispensable tool for batch detection of material thickness on the production line.


Nowadays, due to the rapid development of science and technology, the field of machine vision has been developed and applied rapidly. In the field of thin film thickness measurement, online thickness gauges for thin film coatings have also developed rapidly. Nowadays, with the continuous development of science and technology, thickness measurement The types and technical characteristics of the instrument have also been improved a lot. In the process of application of the thickness gauge, combined with different types of thickness gauges, the use is also very different. Now take the thin film coating thickness gauge of Wuxi Precision Measurement and Control For example, the precision spectrum measurement and control coating (film thickness) online thickness gauge adopts the method of nano-optical interference, which can simultaneously measure 20 layers of unused coatings and films at the same time, and the accuracy is as high as 1nm, which perfectly solves the problem of traditional radiation. The online thickness gauge has the disadvantages of radiation, long offset period, low detection accuracy, and inability to detect coating thickness. The precision measurement and control coating thickness online thickness gauge has high detection accuracy, and at the same time, it can automatically calibrate online in real time, which effectively guarantees the detection accuracy of the online thickness gauge.


Thin film coating online thickness gauge detection principle:


When light of a specific wavelength passes through different materials (different thickness, density, composition), the spectral fringes formed after multiple reflections on the surface and inside are completely different. The system analyzes the spectrum of the received reflected light The interference fringe characteristics are matched and compared with the spectral curves in the system library, and the characteristic curves are simulated and fitted at the same time, and then the coatings with different component thicknesses are measured online.

(1) Incident light is reflected multiple times on the upper and lower surfaces of the film.


(2) The intensity of reflected light is related to the refractive index of the film, the refractive index of the substrate, the film thickness, and the wavelength.


(3) In the case of known refractive index, calculate the film thickness according to the function of the measured reflected light intensity and wavelength.

 

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