Application of Infrared Microscope in Micro Devices in Electronics Industry
1. Application direction: the role of infrared microscope in temperature testing of tiny semiconductor devices
2. Background introduction:
With the development of nanotechnology, its top-down miniaturization method has been applied more and more in the field of semiconductor technology. We used to call IC technology "microelectronics" technology, because the size of transistors is at the micron (10-6 meter) level. However, semiconductor technology is developing very fast. Every two years, a generation will be improved, and the size will be reduced to half of the original size. This is the famous Moore's Law. About 15 years ago, semiconductors began to enter the sub-micron era, which is smaller than the micron era, and then went deeper into the sub-micron era, which was much smaller than the micron era. By 2001, transistors were even smaller than 0.1 micron, or 100 nanometers. Therefore, it is the era of nanoelectronics, and most future ICs will be made of nanotechnology.
3. Technical requirements:
At present, the main failure mode of electronic devices is thermal failure. According to statistics, 55% of the failures of electronic devices are caused by the temperature exceeding the specified value. As the temperature increases, the failure rate of electronic devices increases exponentially. Generally speaking, the working reliability of electronic components is extremely sensitive to temperature, and the reliability will drop by 5% every time the temperature of the device increases by 1 degree at the level of 70-80 degrees. Therefore, it is necessary to detect the temperature of the device quickly and reliably. As the size of semiconductor devices becomes smaller and smaller, higher requirements are placed on the temperature resolution and spatial resolution of detection equipment.
4. On-site shooting heat map
