Application of Infrared Microscope in Micro Devices in Electronic Industry
Application direction: the function of infrared microscope in the temperature measurement of micro semiconductor devices.
Second, the background:
With the development of nanotechnology, its top-down miniaturization has been more and more applied in the field of semiconductor technology. We used to call IC technology "microelectronics" technology, because the size of transistors is in the micron (10-6 meters) level. However, semiconductor technology is developing very fast, and it will progress by one generation every two years, and its size will be reduced to half of its original size. This is the famous Moore's Law. About 15 years ago, semiconductors began to enter the era of sub-micron, that is, less than micron, and then there was an era of deep sub-micron and much smaller than micron. By 2001, the size of the transistor was even less than 0.1 micron, that is, less than 100 nanometers. Therefore, it is the era of nano-electronics, and most of the future IC will be made of nano-technology.
Third, the technical requirements:
At present, the main failure form of electronic devices is thermal failure. According to statistics, 55% of electronic device failures are caused by the temperature exceeding the specified value. With the increase of temperature, the failure rate of electronic devices increases exponentially. Generally speaking, the working reliability of electronic components is extremely sensitive to temperature, and the reliability will decrease by 5% for every 1 degree increase of device temperature at the level of 70-80 degrees. Therefore, it is necessary to detect the temperature of the device quickly and reliably. As the size of semiconductor devices is getting smaller and smaller, higher requirements are put forward for the temperature resolution and spatial resolution of detection equipment.
Fourth, shoot the heat map on the spot (location: a well-known scientific research institute model: INNOMETE SI330)
