Introduction to the Focusing System of the Microscope Tool Measuring Series
The measuring microscope tool series incorporates a highly efficient focusing system for repeated measurement, enabling rapid and highly accurate focusing operations. Today, we will provide an overview of this system.
The measuring microscope tool series integrates high rigidity, high precision, and high efficiency into its focusing system, and supports a loadable focusing module. By using this system, even complex measurement tasks can be efficiently completed through continuous focusing and auto-focus (AF) operations, thereby significantly improving Z-axis measurement efficiency and reducing operator workload. The ingenious design of the tool holder is another notable feature of this series.
The measuring microscope tool series offers two focusing modes: manual focusing and AF. In the coarse focus mode, the specimen can quickly move to the central area of the field of view. In AF tracking mode, the focus can be maintained by tracking the specimen surface, and since the image remains in focus at all times, work efficiency is greatly improved.
AF is particularly effective for high-magnitude objectives, achieving AF within a very small area and delivering reproducibility of up to 1 μm. The
AF system uses a projected light method and can find the focus position even on irregular specimen surfaces. Additionally, it supports 100× objective observation, with a laser spot diameter of less than 1 μm, enabling fine Z-axis adjustment within a small area, and is used for laser focusing point marking in the semiconductor industry.
The measuring microscope tool series assists focusing through an AF system and adjusts the indicated positional deviation to achieve high-precision measurement results. It can freely switch between the intermediate mirrors, and adopts a continuously adjustable LED light source. The control touch panel is user-friendly and easy to operate.
