Coating Thickness Gauge Temperature Compensation Measurement Method
The temperature compensation measurement method of the coating thickness gauge includes the steps of temperature coefficient calibration, power-on zero calibration and thickness measurement, and finally calculates the value of the actual coating thickness dx; using the correlation between the electromagnetic field change of the inductance coil and the temperature, that is, in The value at the infinity end is measured once during the measurement process, and the temperature change coefficient at the infinity end is proportional to the temperature change coefficient when the measuring probe is close to the measured object substrate for measurement. Using this characteristic to realize temperature compensation can reduce the temperature measurement error as much as possible. The measurement error of this method can basically be controlled within 1%, while our current national standard requires within 3%. By comparison, the measurement error of this method can be controlled within 1%. The measurement accuracy has reached the measurement accuracy of international brand machines, and it is still at a very high level in China.
