How film coating on-line thickness gauges work
JSP Thickness Gauge for Thin Film Coatings is an online thickness gauge that uses the principle of optical coating technology to detect the thickness of materials. Spectrum measurement and control of thin film online thickness gauge is commonly used in production lines for batch testing of material thickness, in the thickness measurement process will be measured in real time to show the results to the technician or control system, in order to facilitate the technician or the control system can respond to abnormal data in a timely manner, is an important part of automated production. Nowadays, due to the rapid development of science and technology, the film coating online thickness gauge has become an indispensable tool for batch testing of material thickness on the production line.
Nowadays, due to the rapid development of science and technology, the field of machine vision has been faster development and application, in the field of film thickness measurement, film coating online thickness gauge has also been faster development, now, with the continuous development of science and technology, the type of thickness gauge as well as the technical characteristics of the instrument has also had a lot of improvement, thickness gauge in the process of the application of the thickness gauge, combined with different types of thickness gauge, the use of a lot of different, and now take the wuxi jingpu Measurement and control of the film coating thickness gauge, fine spectrum measurement and control of the coating (film thickness) online thickness gauge, the use of nano-optical interference, at the same time, 20 layers do not use the coating, film for simultaneous measurement, while the accuracy is as high as 1nm, a perfect solution to the traditional ray class online thickness gauge radiation, offset cycle, low detection accuracy, can not detect the shortcomings of the thickness of the coating. Precision spectrum measurement and control of coating thickness online thickness gauge detection of high accuracy, at the same time can real-time online automatic calibration, effectively guarantee the detection accuracy of online thickness gauge.
Film coating online thickness gauge detection principle:
When a specific wavelength of light through different materials (different thickness, density, composition), after the surface and the internal reflection of many times after the formation of spectral fringes are completely different, the system through the analysis of the received spectral interference fringes of the reflected light characteristics, and the system library of spectral curves to match and compare, while the simulation and fitting of characteristic curves, and then each different composition thickness of coating On-line measurement.
(1) Incident light is reflected multiple times on the upper and lower surfaces of the film.
(2) The intensity of the reflected light is related to the refractive index of the film, the refractive index of the substrate, the thickness of the film and the wavelength.
(3) In the case of a known refractive index, the film thickness is calculated as a function of the measured reflected light intensity and wavelength.
